Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Abstract Compliant micromechanisms (CMMs) acquire mobility from the deflection of elastic members and have been proven to be robust by millions silicon MEMS devices. However, limited impedes realization more sophisticated CMMs, which often require larger deflections. Recently, some novel manufacturing processes emerged but are not well known community. In this paper, CMMs is reviewed, aiming provide help mechanical designers quickly find proper method for their CMM designs. To end, literature surveyed was classified statistically analyzed, representative were summarized individually reflect state art manufacturing. Furthermore, features each process collected into tables facilitate reference readers, guidelines selection discussed. The review results indicate that, even though remains dominant, great progress has made in development polymer-related composite-related processes, such as micromolding, SU-8 process, laser ablation, 3D printing, CNT frameworking. These result constituent materials with a lower Young’s modulus maximum allowable strain than silicon, therefore allow deflection. geometrical capabilities (e.g., aspect ratio) methods should also considered, because different types requirements. We conclude that carbon nanotube frameworking will play important roles future owing excellent comprehensive capabilities.